Technische Universität Dresden
Institut für Halbleiter- und Mikrosystemtechnik (IHM)
Address
Nöthnitzer Straße 64
01187 Dresden
Deutschland
GERiT
This institution in GERiT
01187 Dresden
Projects
Research Grants
Current projects
Controllable membrane system
(Applicants
Richter, Andreas
;
Wallmersperger, Thomas
)
Modulation-Acceptor Doping of SiO2 as Novel Doping Method for Silicon Nanowires (MADSiNano)
(Applicants
Hiller, Daniel
;
Mikolajick, Thomas
)
Polymer Networks as Carrier for Organo Catalysts within Continuously Driven Microfluidic Reactor Systems
(Applicant
Kuckling, Dirk
)
Wurtzite Solid Solutions as a New Material Class for Ferroelectric Microelectronics
(Applicants
Fichtner, Simon
;
Mikolajick, Thomas
)
Completed projects
3DFold - Programmed folding of mesoscopic 3D objects by viscoelastic reconfiguration
(Applicant
Kirchner, Robert
)
Elektrochemische Präparation von Diffusionsbarrieren für Mehrmetallschichten und ihr Verhalten bei der Fremdmetalldiffusion
(Applicant
Drescher, Kurt
)
Ferroelectric Hafnium Oxide Material Enhanced Reliability
(Applicant
Mikolajick, Thomas
)
Ferroelectric zirconium oxide for piezo- and pyroelectric devices (Zeppelin)
(Applicants
Böttger, Ulrich
;
Kersch, Alfred
;
Mikolajick, Thomas
)
Fun2D+ | 3D functional mesoscopic system based on 2D materials
(Applicants
Albert, Matthias
;
Kirchner, Robert
)
Herstellung und Charakterisierung von Niobpentoxid-Schichten mit schaltbarer elektrischer Leitfähigkeit
(Applicants
Mikolajick, Thomas
;
Rafaja, David
)
Hydrogelbasierte Mikrofluidik-Prozessoren
(Applicant
Richter, Andreas
)
Impedanz- und elektroakustische Spektroskopie an keramischen Ultra- und Nanofiltrationsmembranen
(Applicant
Mikolajick, Thomas
)
Incipient ferroelectrics based on hafnium oxide
(Applicants
Böttger, Ulrich
;
Kersch, Alfred
;
Mikolajick, Thomas
)
Large-scale integrated microfluidic circuits based on intrinsically active polymers
(Applicant
Richter, Andreas
)
Locally active memristive data processing (LAMP)
(Applicants
Mikolajick, Thomas
;
Tetzlaff, Ronald
)
Low-Voltage High-Frequency Vertical Organic Transistors
(Applicants
Bartha, Johann-Wolfgang
;
Ellinger, Frank
;
Leo, Karl
)
MEMS LMIS Chips: Investigation of Wetting and Operational Stability of Liquid Metal Ion Sources based on Glass Substrates
(Applicant
Tajmar, Martin
)
New wide-gap semiconductor materials for opto-electronics and for fundamental research
(Applicant
Mikolajick, Thomas
)
Optoelektronische Ansteuerung für hochintegrierte MEMS auf Polymerbasis
(Applicant
Richter, Andreas
)
PARFAIT II: Power-aware AmbipolaR Fpga ArchITecture II
(Applicants
Becker, Jürgen
;
Hofmann, Klaus
;
Mikolajick, Thomas
)
PlasCode - Plasmonic Coding in Smart Mesoscopic Particles for Dynamic Detection in Fluid Flows
(Applicants
Kirchner, Robert
;
Zimmer, Klaus
)
Quantum-mechanical device concepts including ultra-thin functional ALD-films for terahertz applications
(Applicants
Bartha, Johann-Wolfgang
;
Wenger, Christian
)
Role of Carbon on the electrical, optical and structural properties of GaN
(Applicant
Mikolajick, Thomas
)
Sound sources based on dielectric elastomers
(Applicants
Altinsoy, Ercan
;
Richter, Andreas
)
Spin Orbit functionalized GRAPHene for resistive-magnetic MEMories
(Applicants
Blügel, Stefan
;
Mikolajick, Thomas
)
Research Units
Completed projects
Bauteilintegrierte Sensorik und Risserkennung in CF-PEEK-Hochleistungsrotoren
(Applicant
Pfeifer, Günther
)
Zentrale Organisation und Verwaltung
(Applicant
Hufenbach, Werner
)
Priority Programmes
Current projects
Biomimetic robots autonomously driven by dielectric elastomers (BROADCAST)
(Applicants
Kraus, Tobias
;
Marschner, Uwe
;
Vorrath, Ernst-Friedrich Markus
)
Cooperative elastomeric multi-actuator platform (CALMAR)
(Applicants
Maas, Jürgen
;
Marschner, Uwe
;
Richter, Andreas
;
Vorrath, Ernst-Friedrich Markus
)
Elastic couplings with integrated flexible dielectric elastomer sensors
(Applicants
Schlecht, Berthold
;
Vorrath, Ernst-Friedrich Markus
;
Wallmersperger, Thomas
)
Neurotransistor-based Memristive Crossbar Memcomputing (NeuroMCross)
(Applicants
Mikolajick, Thomas
;
Slesazeck, Stefan
;
Tetzlaff, Ronald
)
SecuReFET II: Secure Circuits through inherent Reconfigurable FET II
(Applicants
Kumar, Akash
;
Mikolajick, Thomas
)
Completed projects
Electrocaloric multilayer cooling device concepts
(Applicant
Gerlach, Gerald
)
Entwicklung organischer Feldeffekttransistoren auf flexiblen Schaltungsträgern auf Basis von Thiophenderivate
(Applicant
Fischer, Wolf-Joachim
)
Flexible Graphene-Base Heterojunction Transistor for Several Hundred Gigahertz Operation
(Applicants
Bartha, Johann-Wolfgang
;
Wenger, Christian
)
High-frequency modeling and characterization of printed organic crystalline transistors
(Applicants
Mannsfeld, Stefan
;
Schröter, Michael
)
Reconfigurable logic and Multi-bit in-memory processing with ferroelectric memristors -ReLoFeMris
(Applicants
Fey, Dietmar
;
Slesazeck, Stefan
)
Heisenberg Professorships
Completed projects
Polymere Mikrosysteme
(Applicant
Richter, Andreas
)
Heisenberg Fellowships
Completed projects
Integrierte und hochintegrierte mikrotechnische Systeme
(Applicant
Richter, Andreas
)
M3SR: Mesoscopic 3D-structure formation via controlled viscous reconfiguration
(Applicant
Kirchner, Robert
)
Heisenberg Grants
Completed projects
M3SR: Mesoscopic 3D-structure formation via controlled viscous reconfiguration
(Applicant
Kirchner, Robert
)
Collaborative Research Centres
Completed projects
Adaption polymerer Schichten und Gele an Halbleiter- und Mikrostrukturen, Charakterisierung aktorischer und sensorischer Eigenschaften
(Project Head
Drescher, Kurt
)
Integrated wireless sensor networks
(Project Heads
Fischer, Wolf-Joachim
;
Starke, Eric
)
Phasen- und Strukturbildungsphänomene in Metall-Perowskit-Schichtsystemen
(Project Heads
Bartha, Johann-Wolfgang
;
Schönecker, Andreas
)
Polymere als Zwischenebenenisolatoren in Mehrebenenmetallisierungssystemen
(Project Heads
Meusel, Ekkehard
;
Wenzel, Christian
)
Reaktions- und Diffusions-Phänomene in Cu-WTi-SiO2-Schichtsystemen
(Project Head
Drescher, Kurt
)
Reaktive Schichten auf der Basis leitfähiger Polymere und deren Anwendung
(Project Heads
Dunsch, Lothar
;
Fischer, Wolf-Joachim
;
Plieth, Waldfried
;
Rammelt, Ursula
)
Reaktive Silane und Thiole zur Herstellung von Self-Assembly-Schichten, deren Strukturierung und Applikation in der Mikroelektronik und Mikrosystemtechnik
(Project Head
Drescher, Kurt
)
Major Research Instrumentation
Completed projects
Laserablationssystem
Mehrkanal-Lösungs-Druck-System
Rasterelektronenmikroskop
Emmy Noether Independent Junior Research Groups
Current projects
Multifunctional dielectric elastomer electronics for next generation soft robotics
(Applicant
Vorrath, Ernst-Friedrich Markus
)
CRC/Transregios
Current projects
3D Architecture Schemes and Processes
(Project Heads
Lemme, Max Christian
;
Mikolajick, Thomas
)
Central Tasks of the TRR
(Project Head
Mikolajick, Thomas
)
TRR 404: Next Generation Electronics with Active Devices in Three Dimensions (Active-3D)
(Spokesperson
Mikolajick, Thomas
)
Completed projects
High-volume production technologies for glass fibre-reinforced polyurethane composite structures with integrated piezoceramic sensor elements and adapted electronics
(Project Heads
Fischer, Wolf-Joachim
;
Gude, Maik
)
Research Training Groups
Current projects
GRK 2767: Supracolloidal Structures: From Materials to Optical and Electronic Devices
(Spokesperson
Fery, Andreas
)
Completed projects
GRK 51: Sensor Technology
(Spokesperson
Gerlach, Gerald
)
GRK 1401: Nano- and Biotechniques for Electronic Device Packaging
(Spokesperson
Gerlach, Gerald
)
GRK 1865: Hydrogel-based Microsystems
(Spokesperson
Gerlach, Gerald
)
Clusters of Excellence
Completed projects
EXC 1056: Center for Advancing Electronics Dresden (cfAED)
(Spokesperson
Fettweis, Gerhard P.
)
