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Professor Dr. Thomas Geßner (†)

Projects

As Applicant
- Completed projects
  - Poröse Polymere als low-k Dielektrika für Metallisierungssysteme in der Mikroelektronik (Research Grants)
  - Bestimmung und Optimierung des mechanischen Verhaltens von Schichtstapeln mit porösen low-k-Dielektrika (Research Grants)
  - NEMS/MEMS and Nanomaterial-enhanced Passive Components Compatible with Advanced Nano-CMOS for Future One-chip Tunable RF Systems (Research Grants)
  - Modellierung von Nanodevices (Research Units)
As Leader
- Completed projects
  - Beschichtungsanlage (Major Research Instrumentation)
  - DRIE-Plasmaanlage (Major Research Instrumentation)
As Spokesperson
- Completed projects
  - SFB 379: Micromechanical Sensor and Actuator Arrays (Collaborative Research Centres)
  - GRK 1215: Materials and Concepts for Advanced Interconnects (International Research Training Groups)
As Project Head
- Completed projects
  - Neue Technologieplattform für die "Oberflächennahe Silizium-bulk-Mikromechanik" (Collaborative Research Centres)
  - Applikative Systemlösungen (Collaborative Research Centres)
  - Positioniersystem (Collaborative Research Centres)
As Participating Person
- Completed projects
  - MOS detection for nano resonators (Research Units)
As Ehemaliger Antragsteller
- Completed projects
  - Novel nano scale reactive material systems for bonding with internal heat source (Research Grants) to 7/2016
  - Micro Capacitive Transducer for Air-Coupled and Phase-Controlled Ultrasonic Inspection (Research Grants) to 7/2016
  - Zentralprojekt (Research Units) to 7/2016

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