NEMS/MEMS and Nanomaterial-enhanced Passive Components Compatible with Advanced Nano-CMOS for Future One-chip Tunable RF Systems

• Antragsteller: Professor Dr. Thomas Geßner (†)
• Fachliche Zuordnung: Mikrosysteme
• Förderung: Förderung von 2009 bis 2013
• Projektkennung: Deutsche Forschungsgemeinschaft (DFG) - Projektnummer 151246004

The main goal of this project is to develop key technologies for future one-chip tunable RF components, which will be used in future mobile wireless communication tools. The key technologies include NEMS/MEMS for tunable functions, nanomaterial-enhanced passive components in novel LTCC substrates and their wafer-level integration technology with advanced nano-CMOS.

• DFG-Verfahren: Sachbeihilfen
• Internationaler Bezug: Japan
• Beteiligte Person: Professor Masayoshi Esashi