Project Details
Projekt
FOR 845: Self-Organised Nanostructures by Low-Energy Ion Beam Erosion
Subject Area
Physics
Term
from 2007 to 2014
Project identifier
Deutsche Forschungsgemeinschaft (DFG) - Project number 32645656
It is the research objective to win a basic understanding of the nanostructuring processes on semiconductor surfaces by low-energy ion beams with an energy up to some keV. This understanding should include all aspects of the nanostructuring by ion beams, from a description of the fundamental effects during ion bombardment by means of experimental examinations and theoretical simulations, over the study of the formation of structures on mesoscopical scale and the description through adequate theoretical models until to the exploration of selected applications.
Systematic studies the topography and dynamics of the development of structure at different erosion parameters (ion energy, fluence, incident angle, target rotation) and substrate temperatures should deliver a basic understanding for the self-organisation phenomenons. On the basis of the acquired understanding it is striven to establish the method as alternative nano-structuring technology. Simultaneously, a secured database should be developed.
A peculiarity of the Research Unit is the strong focus on a small class from experimentally to examined materials. For most basic experimental and theoretical studies, Si and Ge surfaces stand in the centre of the interest. Beside it some application-oriented at III-V semiconductors examinations are planned. With the applications, first proof are expected over the changed functionality of the structured surfaces or layers. For example, the moth-eye phenomena, well-known from the nature, should be generated on nanostructured quartz surfaces with the help of this self-organisation process and its suitability as anti-reflectivity layer in the VUV spectral region (broadband anti-reflectivity) should be studied.
From the theoretical point of view, the explanation represents a special challenge the miscellaneous surface structures and their space-temporal evolution. In the Research Unit atomistic simulations are applied with the help of molecular-dynamic and kinetic Monte Carlo methods and, on the other hand, continuum-models for the space-temporal development.
One strives for it by successive expansion, modification and consideration of further experimental details of the no-local Kuramoto-Sivashinsky equations, a largely extensive theoretical picture of the structure-forming qualities by ion beam erosion based on continuum-equations for the topography.
Systematic studies the topography and dynamics of the development of structure at different erosion parameters (ion energy, fluence, incident angle, target rotation) and substrate temperatures should deliver a basic understanding for the self-organisation phenomenons. On the basis of the acquired understanding it is striven to establish the method as alternative nano-structuring technology. Simultaneously, a secured database should be developed.
A peculiarity of the Research Unit is the strong focus on a small class from experimentally to examined materials. For most basic experimental and theoretical studies, Si and Ge surfaces stand in the centre of the interest. Beside it some application-oriented at III-V semiconductors examinations are planned. With the applications, first proof are expected over the changed functionality of the structured surfaces or layers. For example, the moth-eye phenomena, well-known from the nature, should be generated on nanostructured quartz surfaces with the help of this self-organisation process and its suitability as anti-reflectivity layer in the VUV spectral region (broadband anti-reflectivity) should be studied.
From the theoretical point of view, the explanation represents a special challenge the miscellaneous surface structures and their space-temporal evolution. In the Research Unit atomistic simulations are applied with the help of molecular-dynamic and kinetic Monte Carlo methods and, on the other hand, continuum-models for the space-temporal development.
One strives for it by successive expansion, modification and consideration of further experimental details of the no-local Kuramoto-Sivashinsky equations, a largely extensive theoretical picture of the structure-forming qualities by ion beam erosion based on continuum-equations for the topography.
DFG Programme
Research Units
Projects
- Atomistische Mechanismen der Erosion von Halbleiteroberflächen (Applicant Urbassek, Herbert Michael )
- Atomistische Simulation der Selbstorganisation bei der Ionenstrahlerosion (Applicant Heinig, Karl-Heinz )
- Charakterisierung der ionenstrahlinduzierten Eigendefekt- und Metallionenverteilung in Silizium und deren Einfluss auf die Musterbildung (Applicant Pietsch, Ullrich )
- Entspiegelung von optischen Oberflächen für den VUV-Spektralbereich (Applicant Frost, Frank )
- Kontrollierte Selbstorganisation bei der niederenergetischen Ionenstrahlerosion von Silizium-Oberflächen durch Vorstrukturierung (Applicant Ziberi, Bashkim )
- Koordination der Forschungsgruppe 845 (Applicant Rauschenbach, Bernd )
- Mechanismen und Manipulation der Musterbildung auf Si(001) (Applicant Michely, Thomas Werner )
- Musterbildung auf Si- und Ge-Oberflächen durch niederenergetische Ionenstrahlerosion (Applicant Frost, Frank )
- Nanostrukturierung von Oberflächen mit direkter Extraktion der Ionen aus Plasmaquellen (Applicant Facsko, Stefan )
- Selbstorganisierte Oberflächenmuster auf Germanium durch schwere Clusterionen (Applicant Bischoff, Lothar )
- Stochastische nichtlineare Feldgleichungen zur Modellierung selbstorganisierter Nanostrukturen bei der Ionenstrahlerosion (Applicant Linz, Stefan Jakob )
Spokesperson
Professor Dr. Bernd Rauschenbach
