NEMS/MEMS and Nanomaterial-enhanced Passive Components Compatible with Advanced Nano-CMOS for Future One-chip Tunable RF Systems

• Applicant: Professor Dr. Thomas Geßner (†)
• Subject Area: Microsystems
• Term: from 2009 to 2013
• Project identifier: Deutsche Forschungsgemeinschaft (DFG) - Project number 151246004

The main goal of this project is to develop key technologies for future one-chip tunable RF components, which will be used in future mobile wireless communication tools. The key technologies include NEMS/MEMS for tunable functions, nanomaterial-enhanced passive components in novel LTCC substrates and their wafer-level integration technology with advanced nano-CMOS.

• DFG Programme: Research Grants
• International Connection: Japan
• Participating Person: Professor Masayoshi Esashi