Ruhr-Universität Bochum
Fakultät für Elektrotechnik und Informationstechnik
Lehrstuhl für Mikrosystemtechnik

Address Universitätsstraße 150
44801 Bochum
Deutschland

GERiT This institution in GERiT

44801 Bochum

Projects

Research Units
- Completed projects
  - FOR 1522: Multi-physical Synthesis and Integration of Complex Radio Frequency Circuits - MUSIK
    (Spokesperson Hein, Matthias )
  - RF-MEMScomponents, M-systems and hybrid integration
    (Applicant Hoffmann, Martin )
Research Grants
- Completed projects
  - Bulk Silicon micromachining for optical fiber switches and attenuators
    (Applicant Voges, Edgar )
  - Fundamentals for ballistic electronics in graphene
    (Applicant Kunze, Ulrich )
  - Grundlagen für ballistische Elektronik in Graphen
    (Applicants Baus, Matthias ; Kurz, Heinrich ; Seyller, Thomas )
Major Research Instrumentation
- Completed projects
Collaborative Research Centres
- Completed projects
  - Integration of multifunctional nanoanalytic
    (Project Head Hoffmann, Martin )
  - Nanotools for NPM-Machines
    (Project Heads Hoffmann, Martin ; Sinzinger, Stefan )
Priority Programmes
- Current projects
  - ADOPT - Adaptive Optics for THz
    (Applicants Ament, Christoph ; Bechtold, Tamara ; Hoffmann, Martin ; Wallrabe, Ulrike )
  - Spatial alignment and functional manipulation of droplet-based systems
    (Applicants Ament, Christoph ; Hoffmann, Martin )
- Completed projects
  - Flexible high-speed thin-film transistors and circuits based on large-area grown two-dimensional transition metal dichalcogenides
    (Applicants Bock, Claudia ; Devi, Anjana )
  - Realisierung eines integrierten Mikroauges aus elektrisch verstimmbaren Membran-Mikrolinsen und -prismen sowie variablen Blenden und Filtern.
    (Applicants Ambacher, Oliver ; Hoffmann, Martin ; Oesterschulze, Egbert ; Sinzinger, Stefan )
CRC/Transregios
- Current projects
  - Dielectric THz Waveguides and MEMS for THz Integrated Circuits
    (Project Head Hoffmann, Martin )
  - High-speed beamforming concepts for THz frequencies
    (Project Heads Czylwik, Andreas ; Häring, Lars ; Schall-Giesecke, Anna Lena ; Schmitt, Lisa )
  - Integrated Research Training Group
    (Project Heads Czylwik, Andreas ; Häring, Lars ; Schmitt, Lisa )
Core Facilities
- Completed projects
  - Core facility Micro-Nano-Integration
    (Applicants Hoffmann, Martin ; Müller, Jens ; Schaaf, Peter )
  - Core facility Micro-Nano-Integration - follow-up application
    (Applicants Hoffmann, Martin ; Müller, Jens ; Schaaf, Peter )