PACVD-Synthese und Charakterisierung von Si/(B)/C/N-Hartstoffschichten für tribologische Anwendungen
Applicant
Professor Dr. Herbert Stafast
Subject Area
Chemical and Thermal Process Engineering
Term
from 2001 to 2006
Project identifier
Deutsche Forschungsgemeinschaft (DFG) - Project number 5313838
Project Description
No abstract available
DFG Programme
Priority Programmes
Subproject of
SPP 1119: Inorganic Materials through Vapor-Phase Synthesis: Interdisciplinary Concepts for Development, Understanding and Controlling of CVD Processes
Participating Persons
Privatdozent Dr. Fritz Falk
;
Professor Ralf Riedel
