MOVPE von Gruppe-III-Nitriden mit intramolekular koordinierten Prekursoren. Mechanistische Studien und Modellierung der Prozesse.
Applicants
Professor Dr.-Ing. Gunther Brenner
;
Professor Dr. Rochus Schmid
Subject Area
Technical Chemistry
Term
from 2001 to 2008
Project identifier
Deutsche Forschungsgemeinschaft (DFG) - Project number 5313702
Project Description
No abstract available
DFG Programme
Priority Programmes
Subproject of
SPP 1119: Inorganic Materials through Vapor-Phase Synthesis: Interdisciplinary Concepts for Development, Understanding and Controlling of CVD Processes
