Chemische Gasphasenabscheidung dünner Silberschichten aus metallorganischen Precursoren
Applicant
Professor Dr. Heinrich Lang
Subject Area
Chemical and Thermal Process Engineering
Term
from 2001 to 2008
Project identifier
Deutsche Forschungsgemeinschaft (DFG) - Project number 5313492
Project Description
No abstract available
DFG Programme
Priority Programmes
Subproject of
SPP 1119: Inorganic Materials through Vapor-Phase Synthesis: Interdisciplinary Concepts for Development, Understanding and Controlling of CVD Processes
