CVS von nanokristallinen Metalloxid-Schichten mittels Pyrolyse von molekularen Metallsiloxiden

• Applicants: Professor Dr. Matthias Drieß; Professor Dr.-Ing. Frank Einar Kruis
• Subject Area: Chemical and Thermal Process Engineering
• Term: from 2001 to 2010
• Project identifier: Deutsche Forschungsgemeinschaft (DFG) - Project number 5313354

No abstract available

• DFG Programme: Priority Programmes
• Subproject of: SPP 1119: Inorganic Materials through Vapor-Phase Synthesis: Interdisciplinary Concepts for Development, Understanding and Controlling of CVD Processes