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Surface acoustic wave magnetic field sensors (A09)

Subject Area Synthesis and Properties of Functional Materials
Microsystems
Term since 2021
Project identifier Deutsche Forschungsgemeinschaft (DFG) - Project number 286471992
 
The research project involves research on Love wave surface acoustic wave (SAW) devices as magnetic field sensors. Two types are studied: SC SAW sensors using piezoelectric single crystals and thin film SAW sensors using a piezoelectric AlScN layer. For the SC SAW, LiNbO3 is to be systematically investigated as a substrate, which enables a wide range variation in operating frequency and design. For thin film SAW sensors, the focus is on improving sensitivity through phononic crystals, reducing substrate losses, and exploring growth of inclined c-axis AlScN films on sapphire.
DFG Programme Collaborative Research Centres
 
 

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