NEMS basierende Diamant Feld Emitter für eine neue Generation verlustarmer RF-Schalter
Zusammenfassung der Projektergebnisse
The main aim of the RF-CUBE project - validation of new actuation and transmission principles for the ac “non-contact” transducers based on flexural vibrations of AlN/NCD resonators - has been successfully accomplished by demonstrating functionality of the field emission based device at sub-MHz frequencies. Moreover, the ideas presented in “Vision” section of the proposal have been as well partly realized using nano-fabrication methods and comprehensive processing technologies in collaboration with our scientific partners. The following topics have received a particular attention and been studied in details: • thin film deposition technologies for high mechanical quality nanodiamond/AlN heterostructures, including stress-management solutions; • studies of mechanical and (piezo)-electrical properties p-NCD and AlN layers in unimorph structures; • down-scaling of resonators down to sub-µm level in order to achieve 1 GHz for flexural vibrations and development of nano-gap technologies; • demonstration of the field emission transconductance for electrostatically coupled cantilever devices; • experimental studies of dominant field-emission mechanisms in these devices. The performed investigations have built a solid basis as for the application-related (e.g. PMUT and VME devices) as well as for the future material and device physics related studies of electro-mechanical and vacuum micro-electronic phenomena observed during RF-CUBE research. Despite of the fact that photon-assisted field emission has not been demonstrated for high frequencies as planned initially, the investigations on this particular subject will be continued further due to the high-potential of this modulation mechanism in high frequency transducers and optical sensors.
Projektbezogene Publikationen (Auswahl)
- Electrostatically coupled vibration modes in unimorph complementary microcantilevers, Appl. Phys. Lett. 100, 124104 (2012)
V. Lebedev, N. Heidrich, F. Knöbber, R. E. Sah, W. Pletschen, B. Raynor, V. Polyakov, V. Cimalla, and O. Ambacher
(Siehe online unter https://doi.org/10.1063/1.3697647) - Corrugated piezoelectric membranes for energy harvesting from aperiodic vibrations, Sensors and Actuators A: Physical 195, 32-37 (2013)
N. Heidrich, F. Knöbber, V. Polyakov, V. Cimalla, W. Pletschen, R.E. Sah, L. Kirste, S. Leopold, S. Hampl, O. Ambacher, V. Lebedev
(Siehe online unter https://doi.org/10.1016/j.sna.2013.02.001) - Corrugated piezoelectric membranes for energy harvesting from aperiodic vibrations, Sensors and Actuators A: Physical 195, 32-37 (2013)
N. Heidrich, F. Knöbber, V. Polyakov, V. Cimalla, W. Pletschen, R.E. Sah, L. Kirste, S. Leopold, S. Hampl, O. Ambacher, V. Lebedev
(Siehe online unter https://doi.org/10.1016/j.sna.2013.02.001) - Crystallographic Texture of Submicron Thin Aluminum Nitride Films on Molybdenum Electrode for Suspended Micro and Nanosystems, ECS Journal of Solid State Science and Technology 2 (2013) P180-P184
R. E. Sah, L. Kirste, H. Kirmse, M. Mildner, L.Wilde, S. Kopta, F. Knöbber, M. Krieg, V. Cimalla, V. Lebedev, and O. Ambacher
(Siehe online unter https://doi.org/10.1149/2.001305jss) - Enhanced mechanical performance of AlN/nanodiamond micro-resonators, J. Micromech. Microeng. 23, 125017 (2013)
N. Heidrich, J. Hees, W. Pletschen, R.E. Sah, L. Kirste, V. Zuerbig, C. Nebel, O. Ambacher and V. Lebedev
(Siehe online unter https://doi.org/10.1088/0960-1317/23/12/125017) - Nano-diamond vacuum MEMS for RF applications, Proc. The 17th International Conference on Transducers & Eurosensors XXVII, Barcelona, SPAIN, 16-20 June 2013, pp. 218-221
N. Heidrich, J. Hees, V. Zuerbig, D. Iankov, W. Pletschen, R. E. Sah, B. Raynor, L. Kirste, C.E. Nebel, O. Ambacher and V. Lebedev
(Siehe online unter https://dx.doi.org/10.1109/Transducers.2013.6626741) - Piezoelectric actuated micro-resonators based on the growth of diamond on aluminum nitride thin films, Nanotechnology 24, 025601 (2013)
J. Hees, N. Heidrich, W. Pletschen, R. E. Sah, M. Wolfer, O. A. Williams, V. Lebedev, C. E. Nebel and O. Ambacher
(Siehe online unter https://doi.org/10.1088/0957-4484/24/2/025601) - Piezoelectrically actuated diamond cantilevers for high-frequency applications, Diamond and Related Materials 38, 69-72 (2013)
N. Heidrich, V. Zuerbig, D. Iankov, W. Pletschen, R.E. Sah, B. Raynor, L. Kirste, C.E. Nebel, O. Ambacher, V. Lebedev
(Siehe online unter https://dx.doi.org/10.1016/j.diamond.2013.06.015) - Transparent diamond electrodes for tunable micro-optical devices, Diamond and Related Materials 38 (2013) 101–103
V. Zuerbig, W. Pletschen, J. Hees, R. E. Sah, L. Kirste, N. Heidrich, C. E. Nebel, O. Ambacher and V. Lebedev
(Siehe online unter https://dx.doi.org/10.1016/j.diamond.2013.06.010) - Nano-diamond based spheres for radio frequency electromechanical resonators, J. Micromech. Microeng. 24, 045015 (2014)
V. Lebedev, D. Iankov, N. Heidrich, V. Zuerbig, C. Wild, V. Cimalla and O. Ambacher
(Siehe online unter https://doi.org/10.1088/0960-1317/24/4/045015) - Processing of nanoscale gaps for boron-doped nanocrystalline diamond based MEMS, Procedia Engineering 87, 903 – 906 (2014)
D. Iankov, V. Zuerbig, W. Pletschen, C. Giese, R. Iannucci, O. Ambacher, V. Lebedev
(Siehe online unter https://dx.doi.org/10.1016/j.proeng.2014.11.301) - Appropriate Salt Concentration of Nanodiamond Colloids for Electrostatic Self-Assembly Seeding of Monosized Individual Diamond Nanoparticles on Silicon Dioxide Surfaces, Langmuir 31, 5319–5325 (2015)
T. Yoshikawa, V. Zuerbig, F. Gao, R. Hoffmann, C. E Nebel, O. Ambacher, V. Lebedev
(Siehe online unter https://doi.org/10.1021/acs.langmuir.5b01060) - “Kontaktlose Mikroschalter auf der Basis von Dünnschichten aus Aluminiumnitrid und nanokristallinem Diamant“ (2015)
N. Heidrich
(Siehe online unter https://dx.doi.org/10.6094/UNIFR/10395)
