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TRR 87:  Pulsed High Power Plasmas for the Synthesis of Nanostructural Functional Layers

Subject Area Computer Science, Systems and Electrical Engineering
Chemistry
Mechanical and Industrial Engineering
Materials Science and Engineering
Physics
Term from 2010 to 2022
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Project identifier Deutsche Forschungsgemeinschaft (DFG) - Project number 138690629
 
The Project combines the expertise in the areas of plasma physics / plasma technology, materials science / surface engineering and interfacial chemistry. On this basis, ternary or quaternary ceramic layer systems on metal substrates with outstanding tribological properties as well as silicon- or carbon-containing oxide layers with outstanding barrier properties on plastic substrates are being investigated. For this purpose, the latest, partially self-developed source technology is used and characterized with a very broad, complementary spectrum of quantitative, also partially newly developed plasma diagnostics and one-off single-particle beam experiments. The focus is on pulsed high-power plasmas, such as High Power Pulsed Magnetron Sputtering (HiPIMS) systems, multi-frequency capacitively coupled plasma (MFCCP) systems and pulsed and high-frequency bias-driven microwave (MW) microwave systems, and inductively coupled plasmas (ICP). In order to meet the above vision, the goal is to explore the relationships between material properties and plasma parameters, to quantify them and to use them for plasma control, layer development and in-situ layer control. In this way, the previously prevailing empirical approach is overcome and a physically and chemically based process understanding is developed.The findings and progress of the first phase (basic modeling interfaces) provided the basis for the further development of the project in the second funding phase. In this study, the correlations between. Were determined for both the "metal route" and the "plastic route" developed the plasma and material models generated in the first phase. This combination establishes a connection between the measured and calculated coating compositions, deposition rates and material properties with the set external process parameters such as power, pressure, gas flows, etc. For these reasons, the second phase was and is under the motto "correlation, integration and scaling". In this way, the findings and methods developed in the project can be made available to other coating processes, reactor systems, surface and material systems and computer codes, and then, in the third phase, the thematic focus on "validation, consistency and transfer ".
DFG Programme CRC/Transregios

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Applicant Institution Ruhr-Universität Bochum
Business and Industry Plansee Composite Materials GmbH
 
 

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