Project Details
Professor Dr. Hartmut Hillmer
Address
Universität Kassel
Institut für Nanostrukturtechnologie und Analytik
34109 Kassel
- As Applicant
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As Leader
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Completed projects
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Dual Beam Focussed Ion Beam (Major Research Instrumentation)
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Nanoimprint Anlage mit SCIL Tooling (Major Research Instrumentation)
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3D Microfabricationsystem based on 2-Photon-Polymerisation (Major Research Instrumentation)
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Inductively Coupled Plasma Chemical Vapour Deposition (ICP-CVD) (Major Research Instrumentation)
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Completed projects
- As Participating Person