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Project Details

Person

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Dr.-Ing. Klaus Zimmer

Address Leibniz-Institut für Oberflächenmodifizierung e.V. (IOM)
Permoserstraße 15
04318 Leipzig

Projects

As Applicant
- Current projects
  - Laser-stimulated reactive atmospheric pressure plasma jet etching processes for ultra-precision processing of optical glasses (LasPlasJet) (Research Grants)
- Completed projects
  - Ionen- und plasmagestützte Übertragung dreidimensionaler Strukturen im µm- und Sub-µm-Bereich (Research Units)
  - Laser induced backside etching of dielectrics (Research Grants)
  - Laserätzen von Festkörpern mittels adsorbierter Schichten (Research Grants)
  - Nanometerpräzise Strukturierung von Festkörpern und dünnen Schichten durch laserinduziertes Vorderseitenätzen (Research Grants)
  - Großflächige Abformung von hinterschnittenen Strukturen für Mikroelektronik und Mikroverbindungstechnik (Research Grants)
  - Grenzflächenselektive, schädigungsarme Strukturierung von dünnen Schichten durch Rückseiten-Laserablation (Research Grants)
  - Nanopatterning of functional materials by transfer of nanoimprint-guided ordered block copolymer structures by means of reactive ion beam etching (Research Grants)
  - Actuated adhesion elements with hierarchical structure for applications on technical surfaces (Research Grants)
  - Local confined laser-induced plasmas for direct writing of low damage patterns by precise reactive etching (Research Grants)
  - PlasCode - Plasmonic Coding in Smart Mesoscopic Particles for Dynamic Detection in Fluid Flows (Research Grants)
As Participating Person
- Completed projects
  - Ion and plasma-enhanced proportional transfer of 3D-structures in the micrometer- and sub-micrometer-range (Research Units)

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