Universität Siegen
Fakultät IV
Department Maschinenbau
Lehrstuhl für Mikro- und Nanoanalytik und -tomographie
Address
Paul-Bonatz-Straße 9-11
57076 Siegen
Deutschland
GERiT
This institution in GERiT
57076 Siegen
Projects
Research Fellowships
Completed projects
Environmental TEM for Micro- and Nanostructure Research
(Applicant
Butz, Benjamin
)
Major Research Instrumentation
Completed projects
Analytisches Transmissionselektronenmikroskop
Dual-beam FIB/SEM with Ga-ion column (Ga-FIB/SEM)
Dual-beam FIB/SEM with multi-species plasma ion column (plasma-FIB/SEM)
Evaporation system with glovebox for metals and reactive materials
Imaging Electron Energy-Loss Spectrometer
Reactive evaporation system for oxides and nitrides
Reactive RF/DC sputter deposition tool for transparent electrodes, insulators and contacts
Core Facilities
Current projects
Siegen Micro- and Nanoanalytics Facility MNaF
Collaborative Research Centres
Completed projects
Aberration-Corrected High-Resolution and in situ Transmission Electron Microscopy of Carbon Allotropes and Related Device Structures
(Project Heads
Butz, Benjamin
;
Spiecker, Erdmann
)
Research Training Groups
Completed projects
GRK 1896: In Situ Microscopy with Electrons, X-Rays and Scanning Probes
(Spokesperson
Spiecker, Erdmann
)
