Technische Universität Ilmenau
Fakultät für Maschinenbau
Institut für Prozessmess- und Sensortechnik
Address
Gustav-Kirchhoff-Straße 1
98693 Ilmenau
Deutschland
GERiT
This institution in GERiT
98693 Ilmenau
Projects
Research Grants
Current projects
Accurate, precise and SI-traceable measurements of mechanical stiffness of microelectromechanical systems with forces in the range from pN to mN
(Applicant
Cherkasova, Valeriya
)
Dynamic and high precision sensor and tool positioning in large measuring volume with the aid of an inverse measurement concept - transfer project
(Applicants
Füßl, Roland
;
Manske, Eberhard
)
Interferometric Six Degree-of-Freedom Direct Fibre Optic Shape Sensing
(Applicant
Kissinger, Thomas
)
Multiaxis Nanofabrication Machine
(Applicant
Fröhlich, Thomas
)
Photon momentum enabled reproducible and SI traceable small-force, -mass and laser power measurements
(Applicant
Vasilyan, Suren
)
Precision interferometry based on highly stable laser sources at 633 nm
(Applicant
Blumröder, Ulrike
)
Scanning beam interference lithography for spatial structures
(Applicants
Haist, Tobias
;
Manske, Eberhard
;
Sawodny, Oliver
)
Synthesis of compliant mechanisms in force measurement and weighing technology for precision applications
(Applicants
Fröhlich, Thomas
;
Zentner, Lena
)
Traceable tactile, active, force and torque measuring coordinate measuring system sensor head
(Applicants
Fröhlich, Thomas
;
Hausotte, Tino
)
Completed projects
3D-characterization of micro balls with nanometer precision
(Applicant
Manske, Eberhard
)
Development of holistic measurement concepts for highly resolved measurement of micro structures based on scanning and imaging optical techniques
(Applicants
Lehmann, Peter
;
Manske, Eberhard
)
DINTOR - Fundamentals for the Realization and Measurement of Dynamic Torque (Dynamic properties of structural elements for application in dynamic torque standards at primary level)
(Applicant
Fröhlich, Thomas
)
Dynamic and high precision sensor positioning in large measuring ranges by means of an inverse measuring concept
(Applicants
Füßl, Roland
;
Manske, Eberhard
)
Dynamische Klimakompensation bei Präzisionsmeßsystemen für mechanische Größen
(Applicant
Jäger, Gerd
)
Einfluss von Verunreinigungen auf die Phasengleichgwichtstemperaturen von Reinstmetallen und binären Metall-Legierungen (Temperatur-Fixpunkte)
(Applicants
Blumröder, Götz
;
Rudtsch, Steffen
;
Sarge, Stefan M.
)
Entwicklung eines Mess- und Antriebssystems für eine 3D-Präzisions-Messmaschine
(Applicant
Jäger, Gerd
)
Entwicklung und Aufbau eines Stehende-Wellen-Interferometers
(Applicant
Jäger, Gerd
)
Highly resolved edge detection and localization of micro structures using optical 3D measurements and simulations
(Applicants
Lehmann, Peter
;
Manske, Eberhard
)
High-precision Pico-AFM for nanometrology and nanofabrication
(Applicant
Manske, Eberhard
)
New mechanical concepts and strategies for adjusting of precision balances
(Applicants
Fröhlich, Thomas
;
Theska, René
)
Novel Small Cantilever
(Applicants
Fröhlich, Thomas
;
Rangelow, Ivo W.
)
Precision generation and measurements of small static and dynamic forces by means of radiation pressure of multipass laser beam
(Applicant
Vasilyan, Suren
)
Scientific Fundamentals for the Realization and Measurement of Small Torques - Development of a Torque Standard Machine for Small Torques with Reduced Uncertainty - DEBRATOR 2
(Applicant
Theska, René
)
stabilized Nd:YAG based two-wavelength-two-frequency-lasers for refraction corrected length measurement
(Applicant
Manske, Eberhard
)
Taktile Sensoren für Anwendungen in der Mikro- und Nanotechnik
(Applicants
Büttgenbach, Stephanus
;
Jäger, Gerd
)
Vereinfachte Kalibriereinrichtung für Strahlungsthermometer mit unmittelbarer Rückführbarkeit auf die ITS-90
(Applicant
Bernhard, Frank
)
Priority Programmes
Current projects
Fibre-optic tactile probe to determine relative motion between a drone and a measurement object for motion correction of a short-range 3D inspection lidar
(Applicant
Kissinger, Thomas
)
Collaborative Research Centres
Completed projects
Integrated Research Training Group
(Project Heads
Manske, Eberhard
;
Theska, René
)
Konstruktion, Aufbau und Erprobung der Maschine
(Project Heads
Jäger, Gerd
;
Manske, Eberhard
;
Theska, René
)
Metrologische Verifikation
(Project Heads
Füßl, Roland
;
Grünwald, Rainer
)
metrology of NPM-machines
(Project Heads
Füßl, Roland
;
Manske, Eberhard
)
Nano measuring technique
(Project Heads
Hausotte, Tino
;
Manske, Eberhard
)
SFB 622: Nanopositioning- and Nanomeasuring Machines
(Spokesperson
Manske, Eberhard
)
Zentrale Aufgaben für den SFB
(Project Heads
Augustin, Silke
;
Manske, Eberhard
)
Major Research Instrumentation
Completed projects
Nanofabrikationsmaschine
Nanopositionier- und Nanomessmaschine
Temperaturkalibrierlabor
WBP Fellowship
Current projects
Realization and dissemination of dynamic forces and related quantities using the Kibble balance principle
(Applicant
Rogge, Norbert
)
Research Training Groups
Current projects
GRK 2182: Tip- and laser-based 3D-Nanofabrication in extended macroscopic working areas
(Spokespersons
Manske, Eberhard
;
Strehle, Steffen
)
Completed projects
GRK 1567: Lorentz Force Velocimetry and Lorentz Force Eddy Current Testing
(Spokesperson
Schumacher, Jörg
)
