Plasma diagnostics for nanoparticle synthesis in novel gas aggregation clustersources with cylindrical magnetrons

• Applicant: Professor Dr. Holger Kersten
• Subject Area: Optics, Quantum Optics and Physics of Atoms, Molecules and Plasmas
• Term: since 2025
• Project identifier: Deutsche Forschungsgemeinschaft (DFG) - Project number 549386415

The experimental investigation of processes in a low-temperature plasma and overall gas phase in a novel gas aggregation cluster source (GAS) is in the focus of the proposed project. The basic physical characteristics such as plasma parameters and laser light nanoparticle scattering will be determined by the Kiel group (CAU) in order to understand nanoparticle nucleation, growth, charging, and transport. In addition Prague group (CU) will observe gas flow dynamics. CU will design and construct novel gas aggregation cluster sources that are based on a post (cylindrical) magnetron with a rotating magnetic circuit or rotating target. These cluster sources will be investigated for the synthesis of nanoparticles (NPs): metals Cu, Zr and etc., and oxides and nitrides. Sputtering in Ar used for metals will be complemented by adding reactive gases (e.g., O2, N2 etc.) to produce metal oxide(ZrO2)or nitride(ZrN) NPs. The post magnetron will be coaxially oriented, however, perpendicular position to the GAS axis will also be explored in the case of the single magnetron. Finally, perpendicularly oriented to the GAS axes twin post magnetrons with static magnetic circuits and rotating targets will be tested at the end. The magnetron power and pulsing, the gas flow pattern and pressure will be varied to control the plasma parameters such as plasma density, electron and ion energy distribution functions, plasma and floating potentials, and energy fluxes that will be studied by the Kiel group (CAU) with their unique techniques to unveil the influence on mechanisms of the NPs formation and their resultant properties. Application of ZrO2 and ZrN NPs deposited at feasible rates will be focused on catalysis and energy harvesting ( water splitting).

• DFG Programme: Research Grants
• International Connection: Czech Republic
• Partner Organisation: Czech Science Foundation
• Cooperation Partner: Professor Dr.-Ing. Andrey Shukurov