Dual-beam FIB/SEM with plasma ion column (plasma-FIB/SEM)

• Subject Area: Materials Engineering
• Term: Funded in 2024
• Project identifier: Deutsche Forschungsgemeinschaft (DFG) - Project number 546742436

The proposed major research instrumentation is a dual-beam scanning electron microscope combining the familiar functions of a scanning electron microscope with the use of a focused ion beam (FIB-SEM). The FIB-SEM is equipped with a unique plasma FIB column for four ion species (xenon, argon, oxygen and nitrogen), which enables fast and contamination-free material removal from metallic and hydrocarbon-based materials (e.g. polymers, adhesives and gels, or even embedded samples and diamond). In addition to modern detectors for analysis of chemistry (EDX, ToF-SIMS) and microstructure (e.g. SE, BSE, EBSD, STEM), the device is also equipped with an integrated load frame (nanoindenter). The plasma FIB-SEM will be used to analyse and evaluate structure-property relationships. In addition to tasks such as the target preparation of TEM lamellas or APT tips as well as high-resolution 3D microstructure analysis, the proposed major research instrumentation will also be used to elaborate completely new methods, such as mechanical 3D tomography via in situ nanoindentation. Further research tasks will focus on the analysis of local residual stress fields (FIB hole drilling method) and the high-resolution analysis of surface chemistry (ToF-SIMS). In terms of its specific performance characteristics, the plasma FIB-SEM requested is designed in such a way that it will play a central role as a key infrastructural component at the applicants’ institution. The procurement of the system can therefore be rated as a central measure to strengthen the profile focus areas "Multifunctional Matter and Multiscale Systems" and "Sustainable Transformation" at the University of Kassel.

• DFG Programme: Major Research Instrumentation
• Major Instrumentation: Zweistrahlrasterelektronenmikroskop mit Plasma-Ionensäule (Plasma-FIB/REM)
• Instrumentation Group: 5120 Rasterelektronenmikroskope (REM)
• Applicant Institution: Universität Kassel
• Leader: Professor Dr.-Ing. Thomas Niendorf