Scanning Electron Microscope (SEM)

• Subject Area: Optics, Quantum Optics and Physics of Atoms, Molecules and Plasmas
• Term: Funded in 2024
• Project identifier: Deutsche Forschungsgemeinschaft (DFG) - Project number 538872483

Nanotechnology is a driving force for scientific and technical progress. Photonic and quantum technology concepts have proven their potential in the research environment and are increasingly changing our lives in the areas of communication, optical technologies, (photovoltaic) energy generation and numerous other fields. The step from research to application requires miniaturization and integration. The Microstructure Laboratory of the 4th Institute of Physics as a central laboratory for micro- and nanostructuring (core facility) provides more than 20 large-scale devices for structuring and characterization and is therefore of crucial importance in this context. Scanning electron microscopy for process control and building process understanding is essential for further success. The installation of this process step on site and directly during the process chains is essential. Due to the targeted structure sizes, highest imaging resolution is required, which is achieved here in top-view as well as through-the-lens scanning electron microscopy. Scanning electron microscopy (SEM) is of great importance as the highest resolution and material-specific characterization method, since any progress in structuring requires exact knowledge of these results. Our focus will be on metals and dielectrics in multilayer systems, integration of quantum optical components such as color centers in (nano)diamonds, morphology and integration of organic and inorganic films such as perovskites, as well as two-dimensional materials such as metal dichalcogenides.

• DFG Programme: Major Research Instrumentation
• Major Instrumentation: Rasterelektronenmikroskop (SEM) - Teilfinanzierung
• Instrumentation Group: 5120 Rasterelektronenmikroskope (REM)
• Applicant Institution: Universität Stuttgart
• Leader: Professor Dr. Harald Giessen