Dual-beam FIB/SEM with Ga-ion column (Ga-FIB/SEM)

• Subject Area: Materials Science
• Term: Funded in 2024
• Project identifier: Deutsche Forschungsgemeinschaft (DFG) - Project number 537236027

Sample characterization, micro-preparation and nanostructuring using ion and electron beams play a crucial role for the broad research at the Faculty of Science and Technology of the University of Siegen. Respective research fields are materials and device research, the nano-sciences, the development of optical/(bio)medical sensors as well as chemistry, physics, and biology. This modern and multifunctional dual-beam FIB/SEM with Ga-ion column, equipped for a wide range of applications, is, together with a complementary equipped multi-species plasma-FIB/SEM, essential part of the long-term research and major instrumentation strategy of the University of Siegen and it’s DFG-funded Micro- and Nanoanalytics Core Facility (MNaF). The instrument is specialized for cryo and in situ applications and thus made attractive and accessible for external research groups. It will not only make common FIB/SEM methodology available to a broad user community but also enables challenging and adventurous research projects, involving highly reactive and sensitive samples like batteries and organic materials, by providing visionary equipment for systematic sample cooling and vacuum/inert-gas transfers. The tool will be located in the new Interdisciplinary Research Building for Nanoanalytics, Nanochemistry and Cyber-physical Sensor Technologies INCYTE. The research center pools the jointly utilized experimental resources of the entire university on 11,000 m2 of space and provides highly qualified lab space to consolidate the whole MNaF, an ISO4 cleanroom, and S1/S2 laboratories in proximity to each other. The main applications of this Ga-FIB/SEM will be 2D/3D analyses at the nanometer scale by (cryo-)SEM/EDXS/EBSD, the preparation of high-quality samples for advanced AC-HR(S)TEM and APT measurements, in situ mechanical testing of structural materials, and electron beam lithography for device fabrication. The instrument is equipped with highly focusing ion and electron optics for various preparation and tomography tasks, even at low primary energies, appropriate detectors, a robust nanomanipulator, and a plasma cleaner. Extensive automation supports the multi-user operation at the MNaF and simplifies handling for method novices. For local crystal structure determination during in situ mechanical experiments and for investigations on highly defective or nanostructured materials, the instrument is equipped with a novel direct electron detection EBSD detector. This allows precise diffraction analysis at very low electron energies, resulting in interaction volumes of only a few (10 nm)3 and drastically reduced electron energy losses. The instrument with cryo-stage and transfer load lock is integrated in the comprehensive cryo/vacuum transfer routines in INCYTE and allows for seamless exchange of samples with a large variety of complementary preparation and characterization instruments.

• DFG Programme: Major Research Instrumentation
• Major Instrumentation: Zweistrahlrasterelektronenmikroskop mit Ga-Ionensäule (Ga-FIB/REM)
• Instrumentation Group: 5120 Rasterelektronenmikroskope (REM)
• Applicant Institution: Universität Siegen
• Leader: Professor Dr. Benjamin Butz