Großflächige Plasmaquellen mit Multijet-Hohlkathoden-Hochfrequenz-Entladung: Untersuchung, Modellierung und Simulation
Subject Area
Electronic Semiconductors, Components and Circuits, Integrated Systems, Sensor Technology, Theoretical Electrical Engineering
Term
from 1998 to 2003
Project identifier
Deutsche Forschungsgemeinschaft (DFG) - Project number 5123426
No abstract available
DFG Programme
Research Grants
