Vertikal-FET in "Oberflächennaher Si-Bulk-Mikromechanik (C 05)

Subject Area Electronic Semiconductors, Components and Circuits, Integrated Systems, Sensor Technology, Theoretical Electrical Engineering
Term from 2001 to 2004
Project identifier Deutsche Forschungsgemeinschaft (DFG) - Project number 5479322
 

Project Description

No abstract available
DFG Programme Collaborative Research Centres
Subproject of SFB 379:  Micromechanical Sensor and Actuator Arrays
Applicant Institution Technische Universität Chemnitz
Project Head Professor Dr.-Ing. Gunter Ebest (†)