Substrate-friendly precision processing in low-κ multilayer systems through synergetic use of UV nanosecond and NIR femtosecond laser pulses (SYNULAS)

• Applicants: Professor Dr. Heinz Paul Huber; Professor Dr. Wolfgang Schulz
• Subject Area: Production Automation and Assembly Technology
• Term: since 2019
• Project identifier: Deutsche Forschungsgemeinschaft (DFG) - Project number 423531130

No abstract available

• DFG Programme: Research Grants