Dielectric THz Waveguides and MEMS for THz Integrated Circuits (C12)

• Subject Area: Microsystems ; Communication Technology and Networks, High-Frequency Technology and Photonic Systems, Signal Processing and Machine Learning for Information Technology
• Term: since 2019
• Project identifier: Deutsche Forschungsgemeinschaft (DFG) - Project number 287022738

THz radiation at the edge to optics allows to guide waves within dielectrics such as high-resistivity silicon. It allows to combine Si-based micro-electro-mechanical systems (MEMS) and integrated-optical THz waveguides on a single substrate to realize THz integrated circuits (TIC). In the 2nd phase, a new honeycomb Si-based carrier membrane as a kind of cladding for dielectric slot and rib waveguides as well as MEMS-based transmissive true-time-delays have been demonstrated successfully as well as MEMS-based reflectarrays in continuation of the 1st phase. In the 3rd phase the integration of complex functionalities in a TIC is planned, besides true-time delays also switches, splitters and the hybrid integration of THz sources. A 4x4 group antenna with four integrated sources is planned as a demonstrator that is especially suitable for mobile systems due to its compact and low-weight setup. This approach beyond state of the art allows to integrate for the first time different functional components on a single continuous honeycomb membrane while maintaining the lateral guidance of the waveguides on a single substrate.

• DFG Programme: CRC/Transregios
• Subproject of: TRR 196: Mobile Material Characterization and Localization by Electromagnetic Sensing
• Applicant Institution: Universität Duisburg-Essen
• Project Head: Professor Dr.-Ing. Martin Hoffmann