MEMS magnetoelectric sensor fabrication (Z01)

• Subject Area: Synthesis and Properties of Functional Materials
• Term: since 2016
• Project identifier: Deutsche Forschungsgemeinschaft (DFG) - Project number 286471992

Service project focuses on the microfabrication of magnetoelectric sensors and partially processed substrates for the realization of the CRC’s scientific work program. The project is a central interface between the sensor and application projects of research areas A and B and relieves the individual scientific projects in the areas of fabrication and quality. To achieve this objective, it maintains a cross-institutional technology platform consisting of separate process modules and full fabrication flows. The technology platform is continuously updated and extended to the latest findings and demands of the CRC’s research projects.

• DFG Programme: Collaborative Research Centres
• Subproject of: SFB 1261: Magnetoelectric Sensors: From Composite Materials to Biomagnetic Diagnostics
• Applicant Institution: Christian-Albrechts-Universität zu Kiel
• Project Heads: Dr.-Ing. Björn Gojdka, since 7/2024; Professor Dr. Fabian Lofink, from 3/2023 until 6/2024; Dr. Dirk Meyners; Dr.-Ing. Florian Niekiel, from 7/2020 until 2/2023