MEMS magnetoelectric sensor fabrication
(Z01)
Subject Area
Synthesis and Properties of Functional Materials
Term
since 2016
Project identifier
Deutsche Forschungsgemeinschaft (DFG) - Project number 286471992
Service project focuses on the microfabrication of magnetoelectric sensors and partially processed substrates for the realization of the CRC’s scientific work program. The project is a central interface between the sensor and application projects of research areas A and B and relieves the individual scientific projects in the areas of fabrication and quality. To achieve this objective, it maintains a cross-institutional technology platform consisting of separate process modules and full fabrication flows. The technology platform is continuously updated and extended to the latest findings and demands of the CRC’s research projects.
DFG Programme
Collaborative Research Centres
