Development and fabrication of functional micromechanical and MicroOptoElectro-Mechanical Systems (MOEMS) by ultra-high resolution 3D multi-photo material processing of new polymer materials

• Antragsteller: Professor Dr. Boris Chichkov; Professor Dr.-Ing. Andreas Ostendorf
• Fachliche Zuordnung: Produktionsautomatisierung und Montagetechnik
• Förderung: Förderung von 2006 bis 2013
• Projektkennung: Deutsche Forschungsgemeinschaft (DFG) - Projektnummer 28464120

The aim of this project is the application of novel multiphoton fabrication technologies for the realization of functional micromechanical and, in general, MicroOptoElectro-Mechanical Systems (MOEMS). Current MOEMS technologies are based on 2D-methodologies adopted from the multi-step fabrication of integrated circuits. Complex 3D structures are usually realized by assembling of separate components and thus, require numerous specialized tools, including high-precision and expensive positioning systems. These drawbacks can be overcome with the novel ultra-high resolution technology based on multi-photon processing (e.g. two-photon polymerization) of photosensitive materials. With this technology complex 3D objects with a sub-urn resolution can be fabricated in a single step without assembling. This technology opens new prospects for the realization of novel MOEMS with increased functionality, integration, and higher level of miniaturization. The multi-photon polymerization technique has a unique potential for the fabrication of interconnected movable components required for 3D architecture of MOEMS. In our preliminary work, the later topic has successfully been demonstrated with the fabrication of microrotors. A particularly challenging aspect of microsystem development lies in the actuation of the micromachines. Traditional actuation approaches, such as hydraulics, pneumatics, electric motors, and internal combustion engines, are either too difficult to fabricate at MOEMS sizes, or simply do not work well at those scales. Of special interest within this project is the development of new materials for the realization of functional MOEMS, starting from the demonstration of micro-actuators and microrobots. To generate a motion of a micromechanical component, the polymer matrices can be combined with metallic or magnetic nanoparticles for electromagnetic actuation. Otherwise, one can add into the fabrication process bimorph materials which can be thermally or optically actuated. The characterization of the 3D multi-photon processing properties of such materials is one of the goals of this project. The second goal, is the demonstration of 3D movable components and actuators for microrobotics and for switching of different micro-systems.

• DFG-Verfahren: Sachbeihilfen
• Großgeräte: Lasersystem
• Gerätegruppe: 5700 Festkörper-Laser