Structural Layout Optimization for MEMS Sensors and Actuators via Coupled PDEs
Final Report Abstract
In this project, we pursued the following steps to satisfy several particular necessities for efficient MEMS design using the structural layout optimization method. 1. A practical layout optimization model is established, which includes suitable expressions of objective function and equality constraints. 2. Using the implicit surface method, structural layout optimization which includes topology, shape and size optimization is seamlessly integrated. 3. Based on the Platform Comsol script, a fully coupled FEM model and corresponding discretization procedure for layout optimization of multiphysics optimization is proposed. 4. Using the developed optimization algorithm, a novel micro stress sensor, and a compliant actuator, are fabricated. 5. The method is also applied to the design of magnetic resonance coils. Following the fabrication of a prototype stress sensor, we are re-designing stress sensor by using the multiple doping ratios on the silicon wafer. In this part, we are collaborating with the Laboratory for Materials, IMTEK, University of Freiburg. We are further exploring the application of the methodology to the design of magnetic resonance microsystems.
Publications
- Adaptive moving mesh level set method for structure topology optimization. Engineering Optimization, 40 2008: 529-558
Z. Liu, J.G. Korvink
- Design and Characterization of In-Plane Silicon Stress Sensors with Isotropic Sensitivity. IEEE Sensor 2008
M. Herrmann, P. Gieschke, Z. Liu, J. Korvink, P. Ruther, O. Paul
- A unified framework for layout optimization of multiphysical microdevices. Habilitationsschrift 2009
Z. Liu
- High order stream function method to automatically design MRI gradient coil. 2009: 3061 (Proceedings of the 17th Scientific Meeting and Exhibition of ISMRM, Honolulu)
F Jia, Z Liu, AM Welz, M Zaitsev, JG Korvink, J Hennig
- Simulation approaches for magnetic resonance imaging sensors. 2009 (10th International Conference on Thermal, Mechanical and Multi-Physics simulation and Experiments in Microelectronics and Microsystems, 2009. EuroSimE 2009.), IEEE (Hrsg).
JG Korvink, Z Liu, A Peter, A Del Tin, J Feng, R Zohair, I El-Khair
(See online at https://dx.doi.org/10.1109/ESIME.2009.4938507) - Topology Optimization for Micro Rotational Mirror Design and Safe Manufacturing. 2009: 1019-1022 (Proceedings of the 22nd IEEE International Conference on Micro Electro Mechanical Systems), IEEE (Hrsg).
T Chen, Z Liu, JG Korvink, U Wallrabe
(See online at https://dx.doi.org/10.1109/MEMSYS.2009.4805559) - Using artificial reaction force to design compliant mechanism with multiple equality displacement constraints. Finite Element in Analysis and Design 45, 2009: 555-568
Z. Liu, J.G. Korvink
- Design Rule and Orientation Layout for MEMS Curved Beams on Silicon. J Microelectromech S, 2010; 19 (3): 706-714
T Chen, Z Liu, JG Korvink, U Wallrabe
(See online at https://dx.doi.org/10.1109/JMEMS.2010.2048416) - Fast optimization method for general surface gradient coil design. 2010: 1528 (Proceedings of the 18th Scientific Meeting and Exhibition of ISMRM, Stockholm)
F Jia, Z Liu, JG Korvink
- Optimization of no-moving part fluidic resistance microvalves with low reynolds number. 2010: 67-70 (23rd International Conference on Micro Electro Mechanical Systems (MEMS), 2010 IEEE), IEEE (Hrsg).
Y Deng, Z Liu, P Zhang, Y Wu, JG Korvink
(See online at https://dx.doi.org/10.1109/MEMSYS.2010.5442565)
