Structural Layout Optimization for MEMS Sensors and Actuators via Coupled PDEs

• Applicant: Professor Dr. Jan Gerrit Korvink
• Subject Area: Microsystems
• Term: from 2006 to 2012
• Project identifier: Deutsche Forschungsgemeinschaft (DFG) - Project number 25556034

The design process in microsystem technology is still largely based on intuition. This is in contrast to other engineering endeavours, and is largely attributed to the fact that the component micro sensors and micro actuators are inherently multiphysical devices and hence often counter-intuitive in behaviour and subject to complex manufacturing process related design constraints. In this project we want to contribute to remedying this situation. Based on a method to cast the layout optimization problem of a multiphysics scenario in terms of a set of partial differential equations, we evolve the design in time towards optimality. Key questions to address are the flexible and general handling of constraints, expressing the sensitivity analysis correctly, maintaining accuracy with mesh adaptivity, and finally testing the predictions of the algorithms and procedures on manufactured devices which provide physical measurement data for feedback. We believe that achieving these goals will greatly benefit the microsystem community, and will provide new insights into topology optimization.

• DFG Programme: Research Grants