Piezo-Polymer Actuators for Polymeric Microfluidic Systems
Final Report Abstract
The project has been started as a successor of a previous DFG project on the same subject. Its main idea was to further study and exploit the characteristics of a novel bending-buckling piezoactuator that has not been used in microfluidics so far. For that, a micropump based on this actuator should be designed, modeled in-deep, fabricated and thoroughly tested. As a main result of the project a novel micropump concept, the so-called Deformable Valve Pump or DVP has been found, realized and tested. This micropump offers the capability of high flowrates at low size, a much lower device complexity when compare with other micropumps, an easier fabrication and an overall high robustness and reliability. Self-filling capabilities and bubble tolerance are achieved through the high stroke of the bending-buckling actuator in use. Moreover, this micropump is also a microvalve with a high fluidic throughput (up to several l/min in pneumatic applications) and relatively high closure pressures (up to 6 bars can be demonstrated). This feature is not known so far for microfluidic devices of that size (below 10 cm³). The project will be continued with the successful acquisition of a BMWi project named “muVaP”, with the aim of funding a start-up company for the design, fabrication and marketing of micropumps and microvalves. Corresponding IP has been generated through two patent applications.
Publications
- A novel piezo actuated high stroke membrane for micropumps, Conference Presentation of the 41st International Micro and Nano Engineering (MNE) 2015, The Hague, Netherlands, September 21-24
A. Shabanian, F. Goldschmidtboeing, P. Woias
- A novel piezo actuated high stroke membrane for micropumps, Microelectronic Engineering 158, 2016, 26–29
A. Shabanian, F. Goldschmidtboeing, S. Vilches, H.-H. Phan, A. Bhat Kashekodi, P. Rajaeipour, P. Woias
(See online at https://doi.org/10.1016/j.mee.2016.03.016) - Low-cost, high-performance and modular valves and pumps using high-stroke actuators for fluid handling, Proc. Micro Total Analysis Systems (µ-TAS) 2016, Dublin, Ireland, October 9-13, 2016, 1320-1321
A. Shabanian, F. Goldschmidtboeing, A. Bhat Kashekodi, S. Vilches, H.-H. Phan, A. Jamali, P. Woias
- Low fluidic resistance valves utilizing buckling actuators, Proc. MST Kongress 2017, Munich, Germany, October 23-25, 2017. ISBN 978-3-8007-4491-6, 211-214
A. Shabanian, F. Goldschmidtboeing, C. Dhananjaya, H. Gowda, E. Baeumker, P. Woias
- The deformable valve pump (DVP), Proc. 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), Kaohsiung, Taiwan, June 18-22, 2017, 1777–1780
A. Shabanian, F. Goldschmidtboeing, H. Gowda, C. Dhananjaya, P. Woias
(See online at https://doi.org/10.1109/TRANSDUCERS.2017.7994413) - Fluidpumpe und Verfahren zum Betreiben einer Fluidpumpe, German patent DE102016217435, 2018
A. Shabanian, F. Goldschmidtboeing, P. Woias
