Piezo-Polymer Actuators for Polymeric Microfluidic Systems

• Applicant: Professor Dr.-Ing. Peter Woias
• Subject Area: Microsystems
• Term: from 2014 to 2019
• Project identifier: Deutsche Forschungsgemeinschaft (DFG) - Project number 245369224

The goal of this research project is the development of a polymeric micropump with very high flowrate and bubble tolerance. This effect will be realized by using a piezoelectrically actuated pump membrane with extremely high stroke volume. A novel configuration with two ring-shaped piezoelectric actuators that uses bending as well as buckling effects is used to achieve such a high displacement volume. During the project a micropump with a double stroke concept will be developed, that was not realized in MEMS technology before. The double stroke concept doubles the displaced volume per cycle and thus also doubles the electro-mechanical efficiency. In addition to research concerning manufacturing technologies for these pumps a sophisticated non-linear model of the actuator and pump dynamics will be developed. In the end a cost effective but nevertheless powerful micropump shall be realized.

• DFG Programme: Research Grants
• Co-Investigator: Dr.-Ing. Frank Goldschmidtböing