Remote Laboratory for Optical Micro Metrology

• Applicant: Professor Dr. Wolfgang Osten
• Subject Area: Microsystems
• Term: from 2012 to 2015
• Project identifier: Deutsche Forschungsgemeinschaft (DFG) - Project number 223883488

The project entitled “Remote Laboratory for Optical Micro Metrology” is a joint proposal by the Institut für Technische Optik (ITO), University of Stuttgart and the Institute of Optoelectronics (IOE) at Shenzhen University. This project aims at building a network-based infrastructure combining optical systems in remote laboratories located in Stuttgart and in Shenzhen, respectively. A framework of remote metrology has been initiated at ITO, and will be further developed in the current joint Sino-German research project. The network-based infrastructure will be enhanced using techniques of 3D imaging and modeling developed at the IOE to provide a more intuitive interface to the physical setup in a virtual reality environment. In addition, the project will address the security of the infrastructure based on a hierarchical security authentication scheme capable of adapting to more complex interaction scenarios. Based on this infrastructure the researchers in Stuttgart and their partners in Shenzhen will conduct joint research on the development of systems for measuring microstructures including biological samples. The ITO group will focus on the development of a multi-task optical metrology system based on the digital holographic microscopy (MT-DHM) with special attention to the measurement of shape, deformations, refractive index of micro samples. The IOE group will explore multi-view quantitative optical microscopy based on their phase-aided active stereo (MV-PAAS) system with emphasis on 3D shape measurement. The development and testing process will be complemented by the integration of both the MT-DHM and the MV-PAAS system into the aforementioned network-based infrastructure. This integrated system will provide the capability for close personal interactions and will allow the researchers at the ITO and the IOE to work and cooperate online, granting remote access to the experimental data, remote control to the experimental setups, and direct personal interaction. At the end of the project, the developed remote metrology system will be made available to the scientific community. The results of the measurements will be automatically transferred to a repository providing global real time access through the internet. Such a system opens up many novel opportunities in industrial inspection, including remote testing and controlling.

• DFG Programme: Research Grants
• International Connection: China
• Participating Person: Professor Dr. Xiang Peng