Simulation of heterogeneous multifunctional components and systems

• Applicant: Professor Dr.-Ing. Jan Mehner
• Subject Area: Microsystems
• Term: from 2011 to 2019
• Project identifier: Deutsche Forschungsgemeinschaft (DFG) - Project number 195215523

The partial project (TP) 2 deals with the methods and software development for the high order multilevel and multidomain compact NEMS-models for system design and simulation together with external electronics. The main focus lies on a general method for the modeling of nano structures within micro structures whereas data from atomistic simulations are linked to FE-simulations of the micro structure. Furthermore, project support FE simulations in TP3, 4, 5 and 7 and collaborate with TP3, 5 and 7 in N/MEMS design and characterization.The working packages are dealing with methodic and algorithmic tasks to support N/MEMS model development. For this purpose, behavioral equations of micro- and nano components shall be formulated. Information of the nanocomponents are going to be parameterized by TP1 on the basis of ab initio atomistic simulations. In parallel, complex form- and functional MEMS elements are going to be calculated by FEM-simulations. These data are going to be interpolated to deliver expressions that will be evaluated in a simple and numerically stable manner.Compact models for the MEMS supporting movable structures are necessary for different designs in various technological description languages. Therefore, the automation of the model extraction is a further task. The specification models for N/MEMS, which have been developed in the first phase, are going to be used for verification on different design levels. Possible parameter variations within N/MEMS should be adapted to analogous components. For the development of evaluation circuits and the firmware of the sensor, system models are strongly required. Based on the generic CNT models from the first project phase, adoptions to distinct device designs are planned within these models.In cooperation with TP3 and TP5, a MEMS test platform is being developed. It combines a movable platform for SWCNTs, sensors, thermal actuator, electrostatic sensors for the displacement measurements, piezoresistive sensors for force-measurements and a pointer in order to amplify movements for optical displacement measurements. The test platform shall be customized to different tasks: static and dynamic analysis of SWCNTs, reliability and fatigue of several types of different nanomaterials (CNTs, nanowires, nanomembranes etc.).The sensor prototypes being prepared within the first project phase are far away from the ideal and periodic models of CNTs (TP1). Therefore, in the second phase, system (TP2) and reliability (TP3) models should be improved and adapted to the measurement results. These adaptations will be based on the data obtained on the atomic scale by AFM, REM and TERS (TP4) depending on parameter variations of technological processes like DRIE and DLP (TP5).Furthermore, the methods for the gap reduction between the electrodes proved in the first funding period shall be used for the fabrication of different capacitive sensor prototypes being designed for various frequency ranges conditi.

• DFG Programme: Research Units
• Subproject of: FOR 1713: Sensoric Micro- and Nanosystems
• Participating Person: Professor Dr.-Ing. Ulrich Heinkel