Electron dynamics in magnetized high power plasmas, especially HPPMS (C05)

• Subject Area: Electronic Semiconductors, Components and Circuits, Integrated Systems, Sensor Technology, Theoretical Electrical Engineering
• Term: from 2010 to 2022
• Project identifier: Deutsche Forschungsgemeinschaft (DFG) - Project number 138690629

In the High Power Pulsed Magnetron Sputtering (HPPMS) regime, fluid dynamic plasma models are not valid and must be replaced by kinetic models. Conventional kinetic simulation methods, such as particle-in-cell / Monte Carlo collisions (PIC/MC), scale quadratically with the electron density and can only be used to a limited extent for HPPMS because of the high numerical complexity. Project C5 establishes alternative, numerically more efficient algorithms for the electron component. Together with the heavy particle model created in project C08, an efficient and at the same time realistic simulation of the HPPMS process and its complex dynamic phenomena (cross-field transport, electron heating, spokes) can be carried out.

• DFG Programme: CRC/Transregios
• Subproject of: TRR 87: Pulsed High Power Plasmas for the Synthesis of Nanostructural Functional Layers
• Applicant Institution: Ruhr-Universität Bochum
• Project Heads: Professor Dr. Ralf-Peter Brinkmann; Professor Dr.-Ing. Thomas Mussenbrock, until 6/2014