HPPMS Plasmas: Time- and space resolved characterisation from target to substrate (A05)

• Subject Area: Optics, Quantum Optics and Physics of Atoms, Molecules and Plasmas
• Term: from 2010 to 2022
• Project identifier: Deutsche Forschungsgemeinschaft (DFG) - Project number 138690629

The enhanced potential within the Spokes is assumed to determine number and energy of ions reaching the substrate. Since spokes rotate azimuthaly with velocities of 5 to 15 km/s this correlation is investigated in detail with space and time resolved diagnostics. This encompasses mass spectrometry as well as active and passive optical diagnostics which are synchronized to the occurrence of spokes by a specific triggering system. Aim of the project is to couple measurments close to the target, within the transport region and at the substrate for a complete description and understanding of the transport and to provide data for validation by the Plasma Surface Model (PSM). Building up on these findings concepts will be developed to improve the transport to the substrate in industry-scale devices.

• DFG Programme: CRC/Transregios
• Subproject of: TRR 87: Pulsed High Power Plasmas for the Synthesis of Nanostructural Functional Layers
• Applicant Institution: Ruhr-Universität Bochum
• Project Heads: Privatdozentin Dr. Teresa de los Arcos, until 6/2014; Professor Dr. Achim von Keudell, since 7/2014; Dr. Volker Schulz-von der Gathen, since 7/2014; Professor Dr. Jörg Winter, until 6/2014