NEMS/MEMS and Nanomaterial-enhanced Passive Components Compatible with Advanced Nano-CMOS for Future One-chip Tunable RF Systems

The main goal of this project is to develop key technologies for future one-chip tunable RF components, which will be used in future mobile wireless communication tools. The key technologies include NEMS/MEMS for tunable functions, nanomaterial-enhanced passive components in novel LTCC substrates and their wafer-level integration technology with advanced nano-CMOS.

DFG-Verfahren Sachbeihilfen

Internationaler Bezug Japan

Beteiligte Person Professor Masayoshi Esashi