Project Details
Person
Professor Dr. Carlo Holly
Address
Rheinisch-Westfälische Technische Hochschule Aachen
Fakultät für Maschinenwesen
Lehrstuhl für Technologie optischer Systeme
Steinbachstraße 15
52074 Aachen
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As Applicant
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Completed projects
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Spectroscopic EUV metrology for nanoscale gratings (Research Grants)
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Completed projects
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As Leader
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Completed projects
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Laser-driven system for the generation of coherent extreme-ultraviolet radiation (Major Research Instrumentation)
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Completed projects
