Project Details
Professor Dr.-Ing. Jens Müller
Address
Technische Universität Ilmenau
Fakultät für Elektrotechnik und Informationstechnik
Institut für Mikro- und Nanoelektronik
Post Office Box 10 05 65
98684 Ilmenau
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As Applicant
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Current projects
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Completed projects
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Core facility Micro-Nano-Integration (Core Facilities)
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SiCer-Technology for RF-MEMS (Research Units)
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Core facility Micro-Nano-Integration - follow-up application (Core Facilities)
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Current projects
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As Leader
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Completed projects
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3D-Pikosekunden-Laserablationsanlage (Major Research Instrumentation)
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Completed projects