Dr. Serhiy Danylyuk

Address Fraunhofer-Institut für Lasertechnik (ILT)
Steinbachstraße 15
52074 Aachen

Projects

As Applicant
- Completed projects
  - Realisation of artificial three-dimensional Ge quantum dot crystals by extreme ultraviolet interference lithography and molecular-beam epitaxy (Research Grants)
As Ehemaliger Antragsteller
- Completed projects
  - Resolution and throughput scalability limits of a compact EUV nanopatterning tool - Erkenntnistransfer-Projekt (Research Grants) to 2/2020