Dr. Serhiy Danylyuk
Address
Fraunhofer-Institut für Lasertechnik (ILT)
Steinbachstraße 15
52074 Aachen
Projects
As Applicant
Completed projects
Realisation of artificial three-dimensional Ge quantum dot crystals by extreme ultraviolet interference lithography and molecular-beam epitaxy
(Research Grants)
As Ehemaliger Antragsteller
Completed projects
Resolution and throughput scalability limits of a compact EUV nanopatterning tool - Erkenntnistransfer-Projekt
(Research Grants) to 2/2020