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Institution

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Technische Universität Ilmenau
Institut für Mikro- und Nanoelektronik
Fachgebiet für Mikro- und nanoelektronische Systeme

Address Post Office Box 100565
98684 Ilmenau
Deutschland

GERiT This institution in GERiT

98684 Ilmenau

Projects

Collaborative Research Centres
- Current projects
  - MEMS Technology for adaptive Sensors
    (Project Heads Ivanov, Ph.D., Tzvetan ; Ziegler, Martin )
- Completed projects
  - High-dynamic nanopositioning for small areas
    (Project Head Rangelow, Ivo W. )
Major Research Instrumentation
- Completed projects
  - Nanoengineering-System
Research Grants
- Completed projects
  - Novel Small Cantilever
    (Applicants Fröhlich, Thomas ; Rangelow, Ivo W. )
Research Training Groups
- Current projects
  - GRK 2182: Tip- and laser-based 3D-Nanofabrication in extended macroscopic working areas
    (Spokespersons Manske, Eberhard ; Strehle, Steffen )

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