Technische Universität Chemnitz
Institut für Mikrosystem- und Halbleitertechnik
Professur Werkstoffe und Zuverlässigkeit mikrotechnischer Systeme

Address Reichenhainer Straße 70
09126 Chemnitz
Deutschland

GERiT This institution in GERiT

09126 Chemnitz

Projects

Research Units
- Completed projects
  - Highly miniaturised fatigue test platform for thermo-mechanical and reliability characterisation of heterogeneously and bottom-up integrated nanofunctionalised components.
    (Applicants Hiller, Karla ; Wunderle, Bernhard )
Major Research Instrumentation
- Completed projects
  - Focused ion beam scanning electron microscope (FIB-SEM)
  - Zweistrahl Focused Ion Beam-Rasterelektronenmikroskop